Automatic Cleaning System
产品简介
制造商:DISCO
型号:DCS141
类别: WAFER & MASK SCRUBBERS
设备详细讯息:
Wafer cleaning system, 8"
Applicable tape frame size: 2"-8"
Table rotating speed: 0-3000 min-1 (RPM)
Spinner discharge pressure: 2.0-12.0 (Mpa)
Air: 0.5 Mpa 216 L/min
N2: 0.5 Mpa 54 L/min
Water: 0.1 Mpa 0.1 L/min
Power: 100 V, Single phase, 1.5 KVa.
咨询热线:400-600-8500