F54
Automatic film mapping
The Filmetrics F54 series is capable of rapidly measuring film thickness at a rate of two points per second, up to 450 mm in diameter, using an electric R-Theta platform that automatically moves to the selected measuring point
Choose from dozens of built-in concentric circle, rectangular, or linear pattern patterns, or build your own unlimited number of measuring points. Anyone with basic computer skills can create their own recipe in minutes
F54 Automated Film mapping simply connects the device to a USB port on your Windows™ computer and can be easily set up in minutes
Different models are mainly distinguished by thickness and wavelength range. Usually thinner films require shorter wavelength measurements (such as F54-UV) to measure thinner films, while longer wavelengths can be used to measure thicker, coarser, or more opaque films
What is included:
-
Integrated spectrometer/light source device
MA-Cmount mounts the adapter
Optical fiber connector
BK7 Reference material
TS-Focus-SiO2-4-10000 thickness standard
4", 6" and 200mm reference wafers
Vacuum pump
Spare lamp
Model and specification
*Depends on the material and the microscope
Model number
|
Thickness range*
|
Wavelength range
|
F54
|
20nm-40μm
|
380-850nm
|
F54-UV
|
4nm-30μm
|
190-1100nm
|
F54-NIR
|
40nm-100μm
|
950-1700nm
|
F54-EXR
|
20nm-100μm
|
380-1700nm
|
F54-UVX
|
4nm-100μm
|
190-1700nm
|
Spot Size
|
500μm Aperture
|
250μm Aperture
|
100μm Aperture
|
50μm Aperture
|
5x Objective:
|
100μm
|
50μm
|
20μm
|
10μm
|
10x Objective:
|
50μm
|
25μm
|
10μm
|
5μm
|
15x Objective:
|
33μm
|
17μm
|
7μm
|
3.5μm
|
50x Objective:
|
10μm
|
5μm
|
2μm
|
1μm
|