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Thickness-Measurement F54
Introduction

F54

Automatic film mapping

The Filmetrics F54 series is capable of rapidly measuring film thickness at a rate of two points per second, up to 450 mm in diameter, using an electric R-Theta platform that automatically moves to the selected measuring point

Choose from dozens of built-in concentric circle, rectangular, or linear pattern patterns, or build your own unlimited number of measuring points. Anyone with basic computer skills can create their own recipe in minutes

F54 Automated Film mapping simply connects the device to a USB port on your Windows™ computer and can be easily set up in minutes

Different models are mainly distinguished by thickness and wavelength range. Usually thinner films require shorter wavelength measurements (such as F54-UV) to measure thinner films, while longer wavelengths can be used to measure thicker, coarser, or more opaque films

What is included:

  • Integrated spectrometer/light source device
    MA-Cmount mounts the adapter
    Optical fiber connector
    BK7 Reference material
    TS-Focus-SiO2-4-10000 thickness standard
    4", 6" and 200mm reference wafers
    Vacuum pump
    Spare lamp

Model and specification

*Depends on the material and the microscope
Model number Thickness range* Wavelength range
F54 20nm-40μm 380-850nm
F54-UV 4nm-30μm 190-1100nm
F54-NIR 40nm-100μm 950-1700nm
F54-EXR 20nm-100μm 380-1700nm
F54-UVX 4nm-100μm 190-1700nm
Spot Size 500μm Aperture 250μm Aperture 100μm Aperture 50μm Aperture
5x Objective: 100μm 50μm 20μm 10μm
10x Objective: 50μm 25μm 10μm 5μm
15x Objective: 33μm 17μm 7μm 3.5μm
50x Objective: 10μm 5μm 2μm 1μm
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In order to pursue the excellent quality of our products, we continually develop manufacturing technology. A superior testing environment was created to guarantee high accuracy and quality of each our provided equipment. Besides, we constantly focus on improving the manufacturing process to increase efficiency and productivity, and to reduce production cost. We, therefore, are able to immeditately respond to customers’ needs with highly competitive products.

CONTACT

M&R Nano Technology Co., LTD. : No. 10, Lane 863, Gaoshi Road, Yangmei District, Taoyuan City
M&R Nano Technology (Dongguan) Co., LTD. : No. 239-7, Middle Dezheng Road, Xianxi Community, Chang 'an Town, Dongguan City

400-699-2885

sam@mrnanotec.com

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