F50 series
Automatic film mapping
The Filmetrics F50 series rapidly maps film thickness at a rate of two points per second. An electric R-Theta platform accepts standard and custom chuck plates with samples up to 450 mm in diameter. (The durable platform can perform millions of measurements in our mass production system!)
The mapping pattern can be polar, rectangular, or linear, or you can create your own mapping method and are not limited by the number of measuring points. Dozens of predefined mapping patterns are built in.
The different F50 instruments are distinguished by wavelength range. The standard F50 is the most popular product. Generally shorter wavelengths (for example, F50-UV) can be used to measure thinner films, while longer wavelengths can be used to measure thicker, more uneven, and more opaque films.
What is included :
Integrated spectrometer/light source device
Fiber optic cable
4", 6" and 200mm reference wafers
TS-SiO2-4-7200
BK7 Reference material
Leveling filter (for high reflection substrate)
Vacuum pump
Spare lamp
Model and specification
*取決於薄膜種類
|
Model
|
thickness*
|
|
|
F50
|
20nm-70μm
|
380-1050nm
|
|
F50-UV
|
5nm-40μm
|
190-1100nm
|
|
F50-NIR
|
100nm-250μm
|
950-1700nm
|
|
F50-EXR
|
20nm-250μm
|
380-1700nm
|
|
F50-UVX
|
5nm-250μm
|
190-1700nm
|
|
F50-XT
|
0.2μm-450μm
|
1440-1690nm
|
|
F50-s980
|
4μm-1mm
|
960-1000nm
|
|
F50-s1310
|
7μm-2mm
|
1280-1340nm
|
|
F50-s1550
|
10μm-3mm
|
1520-1580nm
|
