DektakXT probe profiler
The DektakXT® Probe profiler uses a revolutionary benchtop design to achieve unparalleled repeatability of 4A (0.4nm) with scanning speeds up to 40% higher. This significant milestone in the performance of the probe profiler is the culmination of more than 50 years of innovation and industry leadership by Dektak®. DektakXT combines industry-leading technology and design to deliver extreme performance, ease of use and value, enabling better process monitoring from R&D to quality control. DektakXT's technological breakthroughs support nanoscale surface measurements of key sizes in the microelectronics, semiconductor, solar, high brightness leds, medical and material science industries.

Accelerate data collection and analysis
DektakXT utilizes a unique direct-drive scanning sample stand that speeds up measurement times by 40% while maintaining industry-leading performance. Vision64 is Brook's 64-bit parallel processing manipulation and analysis software that enables faster loading of 3D morphologies and faster application of filters and multi-area database analysis.

Provides the highest repeatability measurement
The single-arch design makes DektakXT more robust, thus minimising the impact of ambient noise. DektakXT's upgraded "smart electronics" reduce the effects of temperature changes and use a modern processor to minimize noise levels, making it a more powerful system capable of measuring step heights of <10nm.

Comprehensive operation and analysis
Brook's Vision64 software joins DektakXT's innovative design by providing the most intuitive and simplified user visualization interface. The combination of intelligent architecture and customizable automation enables fast, comprehensive data collection and analysis. Whether you use analysis scripts to analyze individual scan results or apply custom filter Settings and calculations, DektakXT's data analyzer displays the current analysis results along with other possible analysis tools.

Keep things simple
DektakXT's self-aligned probe assembly allows users to quickly and easily change different probes while eliminating any potential risks in changing needles. Brock offers the widest range of probe sizes and shapes to meet almost any application requirement.

Ensure high throughput testing
DektakXT is able to quickly and easily set up and run automated multi-sample measurement modes to verify the exact thickness of the film across the wafer surface with unparalleled repeatability. This effective monitoring can save valuable time and money by improving test flux.