Microwave vacuum plasma glue remover
Introduction
project
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parameter
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Wafer size
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4"-12"
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microwave power supply
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Power 3KW, frequency 2.45GMHZ
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volume
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100L/450×450×450mm
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Control System
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PLC
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Air configuration
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Standard two-way process gas of oxygen and argon ( CF4 gas can be customized)
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HOTLINE:400-600-8500