LDI laser direct writing lithography machine
Introduction
project
|
parameter
|
Support substrate size
|
12inch (compatible with 8inch)
|
resolution
|
L/S 2/2μm; Hole 4μm
|
Overlay accuracy
|
Front ±0.6μm, back better than 2μm
|
type of light source
|
LD
|
production capacity
|
40WPH
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HOTLINE:400-600-8500