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DUV/EUV mask dust remover
Introduction

project

parameter

Application range

For 3~5~200nm EUV 

Compatible with KrF/ArF  at the same time

equipped with

Compressed air filter, anti-static ion wind, X-Ray anti-static system

Air knife angle

Height & angle can be adjusted manually

Air volume pressure control

Electronic air pressure control

HOTLINE:400-600-8500

If there is any need for our service, please contact us, we will have someone to contact you, thank you!CONTACT

In order to pursue the excellent quality of our products, we continually develop manufacturing technology. A superior testing environment was created to guarantee high accuracy and quality of each our provided equipment. Besides, we constantly focus on improving the manufacturing process to increase efficiency and productivity, and to reduce production cost. We, therefore, are able to immeditately respond to customers’ needs with highly competitive products.

CONTACT

M&R Nano Technology Co., LTD. : No. 10, Lane 863, Gaoshi Road, Yangmei District, Taoyuan City
M&R Nano Technology (Dongguan) Co., LTD. : No. 239-7, Middle Dezheng Road, Xianxi Community, Chang 'an Town, Dongguan City

400-699-2885

sam@mrnanotec.com

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