project
parameter
exposure light source
350W, 500W, 1KW, 2KW mercury lamp/UV-LED
Wafer size
2”-12”
Uniformity
≤ ±3% and ≤±5%
Alignment accuracy
±1μm (optional ±0.5μm)
resolution
±1μm (optional ±0.8μm)
production capacity
≥70wph