Product number: NikonStepper (also second-hand Stepper)
Model: Nikon i8, i9, i10, i11
Nikon stepper stepper setting inspection items:
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stage run test
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Wafer Flatness Test
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Chip flatness test
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Wafer Pre-Alignment Test
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BST test
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step test
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Reticle Rotation Test
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Lens Distortion Test
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Marking Blind Test
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overlap test
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IUC check adjustment
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Check laser power for LSA and interferometer
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Lamp Power Check / Lamp Linearity Check
Load Position Adjustment:
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Loading arm drive position check
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Wafer loader to stage position check
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Pre-2 unit inspection and adjustment
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OF table inspection and adjustment
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Adjust wafer loading position
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Wafer Flow and Adjustment Capabilities
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Check the repeatability of the wafer loader
Keyi also provides you with second-hand Stepper, welcome to contact us